diff --git a/siepic_forge/technology.py b/siepic_forge/technology.py index e29a245..85908c4 100644 --- a/siepic_forge/technology.py +++ b/siepic_forge/technology.py @@ -33,7 +33,7 @@ def ebeam( si_thickness (float): Full silicon layer thickness. si_slab_thickness (float): Partially etched slab thickness in silicon. - sin_thickness (float): SiN layer thinckness. + sin_thickness (float): SiN layer thickness. si_mask_dilation (float): Mask dilation for the full-thickness Si layer. si_slab_mask_dilation (float): Mask dilation for the partially @@ -44,9 +44,9 @@ def ebeam( top_oxide_thickness (float): Thickness of the top oxide clad, measured from the substrate. bottom_oxide_thickness (float): Thickness of the bottom oxide clad. - include_top_opening (bool): Flag indicating wether or not to include - the region above the top oxide. - include_substrate (bool): Flag indicating wether or not to include + include_top_opening (bool): Flag indicating whether or not to + include the region above the top oxide. + include_substrate (bool): Flag indicating whether or not to include the silicon substrate. sio2 (Medium): Background medium. si (Medium): Silicon medium.