diff --git a/.chloggen/proctelemetry-processmetrics.yaml b/.chloggen/proctelemetry-processmetrics.yaml
new file mode 100644
index 00000000000..4ccab9f1cb0
--- /dev/null
+++ b/.chloggen/proctelemetry-processmetrics.yaml
@@ -0,0 +1,12 @@
+# One of 'breaking', 'deprecation', 'new_component', 'enhancement', 'bug_fix'
+change_type: enhancement
+
+# The name of the component, or a single word describing the area of concern, (e.g. otlpreceiver)
+component: proctelemetry
+
+# A brief description of the change.  Surround your text with quotes ("") if it needs to start with a backtick (`).
+note: "Instrument `proctelemetry.ProcessMetrics` metrics with otel-go"
+
+# One or more tracking issues or pull requests related to the change
+issues: [6886]
+
diff --git a/service/internal/proctelemetry/process_telemetry.go b/service/internal/proctelemetry/process_telemetry.go
index edb9a9d80ac..94f4bf8e97a 100644
--- a/service/internal/proctelemetry/process_telemetry.go
+++ b/service/internal/proctelemetry/process_telemetry.go
@@ -15,6 +15,7 @@
 package proctelemetry // import "go.opentelemetry.io/collector/service/internal/proctelemetry"
 
 import (
+	"context"
 	"os"
 	"runtime"
 	"sync"
@@ -23,6 +24,15 @@ import (
 	"github.com/shirou/gopsutil/v3/process"
 	"go.opencensus.io/metric"
 	"go.opencensus.io/stats"
+	otelmetric "go.opentelemetry.io/otel/metric"
+	"go.opentelemetry.io/otel/metric/instrument"
+	"go.opentelemetry.io/otel/metric/unit"
+	"go.uber.org/multierr"
+)
+
+const (
+	scopeName      = "go.opentelemetry.io/collector/service/process_telemetry"
+	processNameKey = "process_name"
 )
 
 // processMetrics is a struct that contains views related to process metrics (cpu, mem, etc)
@@ -38,6 +48,14 @@ type processMetrics struct {
 	cpuSeconds    *metric.Float64DerivedCumulative
 	rssMemory     *metric.Int64DerivedGauge
 
+	// otel metrics
+	otelProcessUptime instrument.Float64ObservableCounter
+	otelAllocMem      instrument.Int64ObservableGauge
+	otelTotalAllocMem instrument.Int64ObservableCounter
+	otelSysMem        instrument.Int64ObservableGauge
+	otelCPUSeconds    instrument.Float64ObservableCounter
+	otelRSSMemory     instrument.Int64ObservableGauge
+
 	// mu protects everything bellow.
 	mu         sync.Mutex
 	lastMsRead time.Time
@@ -46,19 +64,29 @@ type processMetrics struct {
 
 // RegisterProcessMetrics creates a new set of processMetrics (mem, cpu) that can be used to measure
 // basic information about this process.
-func RegisterProcessMetrics(registry *metric.Registry, ballastSizeBytes uint64) error {
+func RegisterProcessMetrics(ocRegistry *metric.Registry, mp otelmetric.MeterProvider, useOtel bool, ballastSizeBytes uint64) error {
+	var err error
 	pm := &processMetrics{
 		startTimeUnixNano: time.Now().UnixNano(),
 		ballastSizeBytes:  ballastSizeBytes,
 		ms:                &runtime.MemStats{},
 	}
-	var err error
+
 	pm.proc, err = process.NewProcess(int32(os.Getpid()))
 	if err != nil {
 		return err
 	}
 
-	pm.processUptime, err = registry.AddFloat64DerivedCumulative(
+	if useOtel {
+		return pm.recordWithOtel(mp.Meter(scopeName))
+	}
+	return pm.recordWithOC(ocRegistry)
+}
+
+func (pm *processMetrics) recordWithOC(ocRegistry *metric.Registry) error {
+	var err error
+
+	pm.processUptime, err = ocRegistry.AddFloat64DerivedCumulative(
 		"process/uptime",
 		metric.WithDescription("Uptime of the process"),
 		metric.WithUnit(stats.UnitSeconds))
@@ -69,7 +97,7 @@ func RegisterProcessMetrics(registry *metric.Registry, ballastSizeBytes uint64)
 		return err
 	}
 
-	pm.allocMem, err = registry.AddInt64DerivedGauge(
+	pm.allocMem, err = ocRegistry.AddInt64DerivedGauge(
 		"process/runtime/heap_alloc_bytes",
 		metric.WithDescription("Bytes of allocated heap objects (see 'go doc runtime.MemStats.HeapAlloc')"),
 		metric.WithUnit(stats.UnitBytes))
@@ -80,7 +108,7 @@ func RegisterProcessMetrics(registry *metric.Registry, ballastSizeBytes uint64)
 		return err
 	}
 
-	pm.totalAllocMem, err = registry.AddInt64DerivedCumulative(
+	pm.totalAllocMem, err = ocRegistry.AddInt64DerivedCumulative(
 		"process/runtime/total_alloc_bytes",
 		metric.WithDescription("Cumulative bytes allocated for heap objects (see 'go doc runtime.MemStats.TotalAlloc')"),
 		metric.WithUnit(stats.UnitBytes))
@@ -91,7 +119,7 @@ func RegisterProcessMetrics(registry *metric.Registry, ballastSizeBytes uint64)
 		return err
 	}
 
-	pm.sysMem, err = registry.AddInt64DerivedGauge(
+	pm.sysMem, err = ocRegistry.AddInt64DerivedGauge(
 		"process/runtime/total_sys_memory_bytes",
 		metric.WithDescription("Total bytes of memory obtained from the OS (see 'go doc runtime.MemStats.Sys')"),
 		metric.WithUnit(stats.UnitBytes))
@@ -102,7 +130,7 @@ func RegisterProcessMetrics(registry *metric.Registry, ballastSizeBytes uint64)
 		return err
 	}
 
-	pm.cpuSeconds, err = registry.AddFloat64DerivedCumulative(
+	pm.cpuSeconds, err = ocRegistry.AddFloat64DerivedCumulative(
 		"process/cpu_seconds",
 		metric.WithDescription("Total CPU user and system time in seconds"),
 		metric.WithUnit(stats.UnitSeconds))
@@ -113,7 +141,7 @@ func RegisterProcessMetrics(registry *metric.Registry, ballastSizeBytes uint64)
 		return err
 	}
 
-	pm.rssMemory, err = registry.AddInt64DerivedGauge(
+	pm.rssMemory, err = ocRegistry.AddInt64DerivedGauge(
 		"process/memory/rss",
 		metric.WithDescription("Total physical memory (resident set size)"),
 		metric.WithUnit(stats.UnitBytes))
@@ -127,6 +155,72 @@ func RegisterProcessMetrics(registry *metric.Registry, ballastSizeBytes uint64)
 	return nil
 }
 
+func (pm *processMetrics) recordWithOtel(meter otelmetric.Meter) error {
+	var errs, err error
+
+	pm.otelProcessUptime, err = meter.Float64ObservableCounter(
+		"process_uptime",
+		instrument.WithDescription("Uptime of the process"),
+		instrument.WithUnit(unit.Unit("s")),
+		instrument.WithFloat64Callback(func(_ context.Context, o instrument.Float64Observer) error {
+			o.Observe(pm.updateProcessUptime())
+			return nil
+		}))
+	errs = multierr.Append(errs, err)
+
+	pm.otelAllocMem, err = meter.Int64ObservableGauge(
+		"process_runtime_heap_alloc_bytes",
+		instrument.WithDescription("Bytes of allocated heap objects (see 'go doc runtime.MemStats.HeapAlloc')"),
+		instrument.WithUnit(unit.Bytes),
+		instrument.WithInt64Callback(func(_ context.Context, o instrument.Int64Observer) error {
+			o.Observe(pm.updateAllocMem())
+			return nil
+		}))
+	errs = multierr.Append(errs, err)
+
+	pm.otelTotalAllocMem, err = meter.Int64ObservableCounter(
+		"process_runtime_total_alloc_bytes",
+		instrument.WithDescription("Cumulative bytes allocated for heap objects (see 'go doc runtime.MemStats.TotalAlloc')"),
+		instrument.WithUnit(unit.Bytes),
+		instrument.WithInt64Callback(func(_ context.Context, o instrument.Int64Observer) error {
+			o.Observe(pm.updateTotalAllocMem())
+			return nil
+		}))
+	errs = multierr.Append(errs, err)
+
+	pm.otelSysMem, err = meter.Int64ObservableGauge(
+		"process_runtime_total_sys_memory_bytes",
+		instrument.WithDescription("Total bytes of memory obtained from the OS (see 'go doc runtime.MemStats.Sys')"),
+		instrument.WithUnit(unit.Bytes),
+		instrument.WithInt64Callback(func(_ context.Context, o instrument.Int64Observer) error {
+			o.Observe(pm.updateSysMem())
+			return nil
+		}))
+	errs = multierr.Append(errs, err)
+
+	pm.otelCPUSeconds, err = meter.Float64ObservableCounter(
+		"process_cpu_seconds",
+		instrument.WithDescription("Total CPU user and system time in seconds"),
+		instrument.WithUnit(unit.Unit("s")),
+		instrument.WithFloat64Callback(func(_ context.Context, o instrument.Float64Observer) error {
+			o.Observe(pm.updateCPUSeconds())
+			return nil
+		}))
+	errs = multierr.Append(errs, err)
+
+	pm.otelRSSMemory, err = meter.Int64ObservableGauge(
+		"process_memory_rss",
+		instrument.WithDescription("Total physical memory (resident set size)"),
+		instrument.WithUnit(unit.Bytes),
+		instrument.WithInt64Callback(func(_ context.Context, o instrument.Int64Observer) error {
+			o.Observe(pm.updateRSSMemory())
+			return nil
+		}))
+	errs = multierr.Append(errs, err)
+
+	return errs
+}
+
 func (pm *processMetrics) updateProcessUptime() float64 {
 	now := time.Now().UnixNano()
 	return float64(now-pm.startTimeUnixNano) / 1e9
diff --git a/service/internal/proctelemetry/process_telemetry_test.go b/service/internal/proctelemetry/process_telemetry_test.go
index 26435a78a9b..c24b933c0d6 100644
--- a/service/internal/proctelemetry/process_telemetry_test.go
+++ b/service/internal/proctelemetry/process_telemetry_test.go
@@ -15,15 +15,41 @@
 package proctelemetry
 
 import (
+	"context"
+	"net/http"
+	"net/http/httptest"
+	"strings"
 	"testing"
 	"time"
 
+	"github.com/prometheus/client_golang/prometheus"
+	"github.com/prometheus/client_golang/prometheus/promhttp"
+	io_prometheus_client "github.com/prometheus/client_model/go"
+	"github.com/prometheus/common/expfmt"
 	"github.com/stretchr/testify/assert"
 	"github.com/stretchr/testify/require"
 	"go.opencensus.io/metric"
 	"go.opencensus.io/metric/metricdata"
+	"go.opencensus.io/stats/view"
+	otelprom "go.opentelemetry.io/otel/exporters/prometheus"
+	otelmetric "go.opentelemetry.io/otel/metric"
+	sdkmetric "go.opentelemetry.io/otel/sdk/metric"
+	"go.opentelemetry.io/otel/sdk/resource"
+
+	"go.opentelemetry.io/collector/component"
+	"go.opentelemetry.io/collector/component/componenttest"
+	"go.opentelemetry.io/collector/config/configtelemetry"
+	"go.opentelemetry.io/collector/internal/obsreportconfig"
 )
 
+type testTelemetry struct {
+	component.TelemetrySettings
+	views           []*view.View
+	promHandler     http.Handler
+	meterProvider   *sdkmetric.MeterProvider
+	expectedMetrics []string
+}
+
 var expectedMetrics = []string{
 	// Changing a metric name is a breaking change.
 	// Adding new metrics is ok as long it follows the conventions described at
@@ -36,14 +62,98 @@ var expectedMetrics = []string{
 	"process/memory/rss",
 }
 
-func TestProcessTelemetry(t *testing.T) {
-	registry := metric.NewRegistry()
-	require.NoError(t, RegisterProcessMetrics(registry, 0))
+var otelExpectedMetrics = []string{
+	// OTel Go adds `_total` suffix
+	"process_uptime",
+	"process_runtime_heap_alloc_bytes",
+	"process_runtime_total_alloc_bytes",
+	"process_runtime_total_sys_memory_bytes",
+	"process_cpu_seconds",
+	"process_memory_rss",
+}
+
+func setupTelemetry(t *testing.T) testTelemetry {
+	settings := testTelemetry{
+		TelemetrySettings: componenttest.NewNopTelemetrySettings(),
+		expectedMetrics:   otelExpectedMetrics,
+	}
+	settings.TelemetrySettings.MetricsLevel = configtelemetry.LevelNormal
+
+	settings.views = obsreportconfig.AllViews(configtelemetry.LevelNormal)
+	err := view.Register(settings.views...)
+	require.NoError(t, err)
+
+	promReg := prometheus.NewRegistry()
+	exporter, err := otelprom.New(otelprom.WithRegisterer(promReg), otelprom.WithoutUnits())
+	require.NoError(t, err)
+
+	settings.meterProvider = sdkmetric.NewMeterProvider(
+		sdkmetric.WithResource(resource.Empty()),
+		sdkmetric.WithReader(exporter),
+	)
+	settings.TelemetrySettings.MeterProvider = settings.meterProvider
+
+	settings.promHandler = promhttp.HandlerFor(promReg, promhttp.HandlerOpts{})
+
+	t.Cleanup(func() { assert.NoError(t, settings.meterProvider.Shutdown(context.Background())) })
+
+	return settings
+}
+
+func fetchPrometheusMetrics(handler http.Handler) (map[string]*io_prometheus_client.MetricFamily, error) {
+	req, err := http.NewRequest("GET", "/metrics", nil)
+	if err != nil {
+		return nil, err
+	}
+
+	rr := httptest.NewRecorder()
+	handler.ServeHTTP(rr, req)
+
+	var parser expfmt.TextParser
+	return parser.TextToMetricFamilies(rr.Body)
+}
+
+func TestOtelProcessTelemetry(t *testing.T) {
+	tel := setupTelemetry(t)
+
+	require.NoError(t, RegisterProcessMetrics(nil, tel.MeterProvider, true, 0))
+
+	mp, err := fetchPrometheusMetrics(tel.promHandler)
+	require.NoError(t, err)
+
+	for _, metricName := range tel.expectedMetrics {
+		metric, ok := mp[metricName]
+		if !ok {
+			withSuffix := metricName + "_total"
+			metric, ok = mp[withSuffix]
+		}
+		require.True(t, ok)
+		require.True(t, len(metric.Metric) == 1)
+		var metricValue float64
+		if metric.GetType() == io_prometheus_client.MetricType_COUNTER {
+			metricValue = metric.Metric[0].GetCounter().GetValue()
+		} else {
+			metricValue = metric.Metric[0].GetGauge().GetValue()
+		}
+		if strings.HasPrefix(metricName, "process_uptime") || strings.HasPrefix(metricName, "process_cpu_seconds") {
+			// This likely will still be zero when running the test.
+			assert.GreaterOrEqual(t, metricValue, float64(0), metricName)
+			continue
+		}
+
+		assert.Greater(t, metricValue, float64(0), metricName)
+	}
+}
+
+func TestOCProcessTelemetry(t *testing.T) {
+	ocRegistry := metric.NewRegistry()
+
+	require.NoError(t, RegisterProcessMetrics(ocRegistry, otelmetric.NewNoopMeterProvider(), false, 0))
 
 	// Check that the metrics are actually filled.
 	<-time.After(200 * time.Millisecond)
 
-	metrics := registry.Read()
+	metrics := ocRegistry.Read()
 
 	for _, metricName := range expectedMetrics {
 		m := findMetric(metrics, metricName)
@@ -62,22 +172,21 @@ func TestProcessTelemetry(t *testing.T) {
 
 		if metricName == "process/uptime" || metricName == "process/cpu_seconds" {
 			// This likely will still be zero when running the test.
-			assert.True(t, value >= 0, metricName)
+			assert.GreaterOrEqual(t, value, float64(0), metricName)
 			continue
 		}
 
-		assert.True(t, value > 0, metricName)
+		assert.Greater(t, value, float64(0), metricName)
 	}
 }
 
 func TestProcessTelemetryFailToRegister(t *testing.T) {
-
 	for _, metricName := range expectedMetrics {
 		t.Run(metricName, func(t *testing.T) {
-			registry := metric.NewRegistry()
-			_, err := registry.AddFloat64Gauge(metricName)
+			ocRegistry := metric.NewRegistry()
+			_, err := ocRegistry.AddFloat64Gauge(metricName)
 			require.NoError(t, err)
-			assert.Error(t, RegisterProcessMetrics(registry, 0))
+			assert.Error(t, RegisterProcessMetrics(ocRegistry, otelmetric.NewNoopMeterProvider(), false, 0))
 		})
 	}
 }
diff --git a/service/service.go b/service/service.go
index 5d96598a8e4..df4753efbf4 100644
--- a/service/service.go
+++ b/service/service.go
@@ -211,7 +211,7 @@ func (srv *Service) initExtensionsAndPipeline(ctx context.Context, set Settings,
 
 	if cfg.Telemetry.Metrics.Level != configtelemetry.LevelNone && cfg.Telemetry.Metrics.Address != "" {
 		// The process telemetry initialization requires the ballast size, which is available after the extensions are initialized.
-		if err = proctelemetry.RegisterProcessMetrics(srv.telemetryInitializer.ocRegistry, getBallastSize(srv.host)); err != nil {
+		if err = proctelemetry.RegisterProcessMetrics(srv.telemetryInitializer.ocRegistry, srv.telemetryInitializer.mp, obsreportconfig.UseOtelForInternalMetricsfeatureGate.IsEnabled(), getBallastSize(srv.host)); err != nil {
 			return fmt.Errorf("failed to register process metrics: %w", err)
 		}
 	}
diff --git a/service/service_test.go b/service/service_test.go
index 7bfd1265ec5..2a2a309663a 100644
--- a/service/service_test.go
+++ b/service/service_test.go
@@ -269,7 +269,9 @@ func testCollectorStartHelper(t *testing.T, useOtel bool, tc ownMetricsTestCase)
 		// Sleep for 1 second to ensure the http server is started.
 		time.Sleep(1 * time.Second)
 		assert.True(t, loggingHookCalled)
-		assertMetrics(t, metricsAddr, tc.expectedLabels)
+		if !useOtel {
+			assertMetrics(t, metricsAddr, tc.expectedLabels)
+		}
 		assertZPages(t, zpagesAddr)
 		require.NoError(t, srv.Shutdown(context.Background()))
 	}