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VACANCY_3.7MeV.txt
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VACANCY_3.7MeV.txt
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====== H (10) into Layer 1 =======
SRIM-2013.00
==========================================
Ion and Target VACANCY production
See SRIM Outputs\TDATA.txt for calc. details
==========================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
See file : SRIM Outputs\TDATA.txt for calculation data
Ion = H Energy = 3700 keV
============= TARGET MATERIAL ======================================
Layer 1 : Layer 1
Layer Width = 4.E+06 A ;
Layer # 1- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
Layer # 1- Si = 100 Atomic Percent = 100 Mass Percent
====================================================================
Total Ions calculated =11442.47
Total Target Vacancies = 48 /Ion
==========================================================
Table Units are >>>> Vacancies/(Angstrom-Ion) <<<<
==========================================================
TARGET VACANCIES VACANCIES
DEPTH by by
(Ang.) IONS RECOILS
----------- ----------- ------------
400000.E-01 2344.34E-09 6851.15E-09
800000.E-01 3187.69E-09 7462.53E-09
120000.E+00 3607.18E-09 4337.20E-09
160000.E+00 3834.40E-09 5967.59E-09
200000.E+00 3967.68E-09 7587.52E-09
240000.E+00 3878.10E-09 6953.15E-09
280000.E+00 4155.57E-09 6115.01E-09
320000.E+00 4157.76E-09 6916.46E-09
360000.E+00 4358.76E-09 1067.47E-08
400000.E+00 4354.39E-09 8921.77E-09
440000.E+00 4548.84E-09 1272.04E-08
480000.E+00 4651.53E-09 9167.11E-09
520000.E+00 4697.41E-09 8302.44E-09
560000.E+00 4826.32E-09 1700.09E-08
600000.E+00 5027.32E-09 9868.10E-09
640000.E+00 5230.51E-09 1307.68E-08
680000.E+00 5261.10E-09 1207.14E-08
720000.E+00 5643.45E-09 1293.21E-08
760000.E+00 6025.80E-09 2605.85E-08
800000.E+00 6287.98E-09 1273.89E-08
840000.E+00 6517.39E-09 1125.35E-08
880000.E+00 6781.75E-09 1365.26E-08
920000.E+00 7185.95E-09 1913.04E-08
960000.E+00 7734.35E-09 1615.29E-08
100000.E+01 8361.40E-09 2377.12E-08
104000.E+01 8975.34E-09 1924.24E-08
108000.E+01 9825.24E-09 2386.58E-08
112000.E+01 1125.63E-08 2876.47E-08
116000.E+01 1268.96E-08 2085.67E-08
120000.E+01 1554.30E-08 4323.52E-08
124000.E+01 1965.27E-08 4492.16E-08
128000.E+01 3664.20E-08 6288.37E-08
132000.E+01 1147.22E-07 1430.20E-07
136000.E+01 7985.82E-08 7682.63E-08
140000.E+01 5558.24E-09 4066.82E-09
144000.E+01 0000.00E+00 0000.00E+00
148000.E+01 0000.00E+00 0000.00E+00
152000.E+01 0000.00E+00 0000.00E+00
156000.E+01 0000.00E+00 0000.00E+00
160000.E+01 0000.00E+00 0000.00E+00
164000.E+01 0000.00E+00 0000.00E+00
168000.E+01 0000.00E+00 0000.00E+00
172000.E+01 0000.00E+00 0000.00E+00
176000.E+01 0000.00E+00 0000.00E+00
180000.E+01 0000.00E+00 0000.00E+00
184000.E+01 0000.00E+00 0000.00E+00
188000.E+01 0000.00E+00 0000.00E+00
192000.E+01 0000.00E+00 0000.00E+00
196000.E+01 0000.00E+00 0000.00E+00
200000.E+01 0000.00E+00 0000.00E+00
204000.E+01 0000.00E+00 0000.00E+00
208000.E+01 0000.00E+00 0000.00E+00
212000.E+01 0000.00E+00 0000.00E+00
216000.E+01 0000.00E+00 0000.00E+00
220000.E+01 0000.00E+00 0000.00E+00
224000.E+01 0000.00E+00 0000.00E+00
228000.E+01 0000.00E+00 0000.00E+00
232000.E+01 0000.00E+00 0000.00E+00
236000.E+01 0000.00E+00 0000.00E+00
240000.E+01 0000.00E+00 0000.00E+00
244000.E+01 0000.00E+00 0000.00E+00
248000.E+01 0000.00E+00 0000.00E+00
252000.E+01 0000.00E+00 0000.00E+00
256000.E+01 0000.00E+00 0000.00E+00
260000.E+01 0000.00E+00 0000.00E+00
264000.E+01 0000.00E+00 0000.00E+00
268000.E+01 0000.00E+00 0000.00E+00
272000.E+01 0000.00E+00 0000.00E+00
276000.E+01 0000.00E+00 0000.00E+00
280000.E+01 0000.00E+00 0000.00E+00
284000.E+01 0000.00E+00 0000.00E+00
288000.E+01 0000.00E+00 0000.00E+00
292000.E+01 0000.00E+00 0000.00E+00
296000.E+01 0000.00E+00 0000.00E+00
300000.E+01 0000.00E+00 0000.00E+00
304000.E+01 0000.00E+00 0000.00E+00
308000.E+01 0000.00E+00 0000.00E+00
312000.E+01 0000.00E+00 0000.00E+00
316000.E+01 0000.00E+00 0000.00E+00
320000.E+01 0000.00E+00 0000.00E+00
324000.E+01 0000.00E+00 0000.00E+00
328000.E+01 0000.00E+00 0000.00E+00
332000.E+01 0000.00E+00 0000.00E+00
336000.E+01 0000.00E+00 0000.00E+00
340000.E+01 0000.00E+00 0000.00E+00
344000.E+01 0000.00E+00 0000.00E+00
348000.E+01 0000.00E+00 0000.00E+00
352000.E+01 0000.00E+00 0000.00E+00
356000.E+01 0000.00E+00 0000.00E+00
360000.E+01 0000.00E+00 0000.00E+00
364000.E+01 0000.00E+00 0000.00E+00
368000.E+01 0000.00E+00 0000.00E+00
372000.E+01 0000.00E+00 0000.00E+00
376000.E+01 0000.00E+00 0000.00E+00
380000.E+01 0000.00E+00 0000.00E+00
384000.E+01 0000.00E+00 0000.00E+00
388000.E+01 0000.00E+00 0000.00E+00
392000.E+01 0000.00E+00 0000.00E+00
396000.E+01 0000.00E+00 0000.00E+00
400000.E+01 0000.00E+00 0000.00E+00
To convert to Energy Lost - multiply by Average Binding Energy = 2 eV/Vacancy