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Copy pathVACANCY_4.7MeV.txt
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VACANCY_4.7MeV.txt
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====== H (10) into Layer 1 =======
SRIM-2013.00
==========================================
Ion and Target VACANCY production
See SRIM Outputs\TDATA.txt for calc. details
==========================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
See file : SRIM Outputs\TDATA.txt for calculation data
Ion = H Energy = 4700 keV
============= TARGET MATERIAL ======================================
Layer 1 : Layer 1
Layer Width = 4.E+06 A ;
Layer # 1- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
Layer # 1- Si = 100 Atomic Percent = 100 Mass Percent
====================================================================
Total Ions calculated =5329.17
Total Target Vacancies = 57 /Ion
==========================================================
Table Units are >>>> Vacancies/(Angstrom-Ion) <<<<
==========================================================
TARGET VACANCIES VACANCIES
DEPTH by by
(Ang.) IONS RECOILS
----------- ----------- ------------
400000.E-01 1641.91E-09 1885.67E-09
800000.E-01 2256.45E-09 1018.04E-08
120000.E+00 2861.61E-09 4480.85E-09
160000.E+00 3114.93E-09 6770.15E-09
200000.E+00 2838.15E-09 5958.85E-09
240000.E+00 3021.11E-09 8784.44E-09
280000.E+00 3110.24E-09 1180.63E-08
320000.E+00 3082.09E-09 2117.99E-08
360000.E+00 3161.84E-09 4498.90E-09
400000.E+00 3002.34E-09 4404.46E-09
440000.E+00 3180.61E-09 7821.24E-09
480000.E+00 3311.96E-09 7669.25E-09
520000.E+00 3419.86E-09 2010.28E-08
560000.E+00 3466.77E-09 8731.99E-09
600000.E+00 3504.30E-09 1519.93E-08
640000.E+00 3537.14E-09 8835.30E-09
680000.E+00 3560.59E-09 2208.76E-08
720000.E+00 3654.42E-09 5590.69E-09
760000.E+00 3448.00E-09 6271.59E-09
800000.E+00 4175.13E-09 1127.16E-08
840000.E+00 3837.37E-09 9249.35E-09
880000.E+00 3982.80E-09 5752.77E-09
920000.E+00 4212.66E-09 1180.95E-08
960000.E+00 4128.22E-09 9688.92E-09
100000.E+01 4165.75E-09 2257.60E-08
104000.E+01 4606.72E-09 6540.58E-09
108000.E+01 4287.72E-09 1654.15E-08
112000.E+01 4555.12E-09 8464.84E-09
116000.E+01 4705.24E-09 1062.00E-08
120000.E+01 5014.85E-09 1087.88E-08
124000.E+01 5010.16E-09 8297.10E-09
128000.E+01 5113.37E-09 1464.01E-08
132000.E+01 5437.06E-09 1039.65E-08
136000.E+01 5620.01E-09 7241.71E-09
140000.E+01 5901.48E-09 9476.73E-09
144000.E+01 6253.32E-09 1352.39E-08
148000.E+01 6398.75E-09 1023.17E-08
152000.E+01 6581.70E-09 1103.26E-08
156000.E+01 7036.74E-09 1825.76E-08
160000.E+01 7468.33E-09 1436.52E-08
164000.E+01 8167.31E-09 2930.47E-08
168000.E+01 8753.71E-09 1415.80E-08
172000.E+01 9560.59E-09 1910.37E-08
176000.E+01 1063.96E-08 3021.75E-08
180000.E+01 1218.76E-08 3122.44E-08
184000.E+01 1510.09E-08 3107.46E-08
188000.E+01 2020.95E-08 4561.40E-08
192000.E+01 3795.62E-08 6344.83E-08
196000.E+01 8908.52E-08 1226.79E-07
200000.E+01 8759.34E-08 9096.11E-08
204000.E+01 2399.06E-08 2230.27E-08
208000.E+01 1777.95E-09 1319.21E-09
212000.E+01 4691.16E-12 0000.00E+00
216000.E+01 0000.00E+00 0000.00E+00
220000.E+01 0000.00E+00 0000.00E+00
224000.E+01 0000.00E+00 0000.00E+00
228000.E+01 0000.00E+00 0000.00E+00
232000.E+01 0000.00E+00 0000.00E+00
236000.E+01 0000.00E+00 0000.00E+00
240000.E+01 0000.00E+00 0000.00E+00
244000.E+01 0000.00E+00 0000.00E+00
248000.E+01 0000.00E+00 0000.00E+00
252000.E+01 0000.00E+00 0000.00E+00
256000.E+01 0000.00E+00 0000.00E+00
260000.E+01 0000.00E+00 0000.00E+00
264000.E+01 0000.00E+00 0000.00E+00
268000.E+01 0000.00E+00 0000.00E+00
272000.E+01 0000.00E+00 0000.00E+00
276000.E+01 0000.00E+00 0000.00E+00
280000.E+01 0000.00E+00 0000.00E+00
284000.E+01 0000.00E+00 0000.00E+00
288000.E+01 0000.00E+00 0000.00E+00
292000.E+01 0000.00E+00 0000.00E+00
296000.E+01 0000.00E+00 0000.00E+00
300000.E+01 0000.00E+00 0000.00E+00
304000.E+01 0000.00E+00 0000.00E+00
308000.E+01 0000.00E+00 0000.00E+00
312000.E+01 0000.00E+00 0000.00E+00
316000.E+01 0000.00E+00 0000.00E+00
320000.E+01 0000.00E+00 0000.00E+00
324000.E+01 0000.00E+00 0000.00E+00
328000.E+01 0000.00E+00 0000.00E+00
332000.E+01 0000.00E+00 0000.00E+00
336000.E+01 0000.00E+00 0000.00E+00
340000.E+01 0000.00E+00 0000.00E+00
344000.E+01 0000.00E+00 0000.00E+00
348000.E+01 0000.00E+00 0000.00E+00
352000.E+01 0000.00E+00 0000.00E+00
356000.E+01 0000.00E+00 0000.00E+00
360000.E+01 0000.00E+00 0000.00E+00
364000.E+01 0000.00E+00 0000.00E+00
368000.E+01 0000.00E+00 0000.00E+00
372000.E+01 0000.00E+00 0000.00E+00
376000.E+01 0000.00E+00 0000.00E+00
380000.E+01 0000.00E+00 0000.00E+00
384000.E+01 0000.00E+00 0000.00E+00
388000.E+01 0000.00E+00 0000.00E+00
392000.E+01 0000.00E+00 0000.00E+00
396000.E+01 0000.00E+00 0000.00E+00
400000.E+01 0000.00E+00 0000.00E+00
To convert to Energy Lost - multiply by Average Binding Energy = 2 eV/Vacancy