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VACANCY_5.3MeV.txt
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VACANCY_5.3MeV.txt
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====== H (10) into Layer 1 =======
SRIM-2013.00
==========================================
Ion and Target VACANCY production
See SRIM Outputs\TDATA.txt for calc. details
==========================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
See file : SRIM Outputs\TDATA.txt for calculation data
Ion = H Energy = 5300 keV
============= TARGET MATERIAL ======================================
Layer 1 : Layer 1
Layer Width = 4.E+06 A ;
Layer # 1- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
Layer # 1- Si = 100 Atomic Percent = 100 Mass Percent
====================================================================
Total Ions calculated =6123.00
Total Target Vacancies = 60 /Ion
==========================================================
Table Units are >>>> Vacancies/(Angstrom-Ion) <<<<
==========================================================
TARGET VACANCIES VACANCIES
DEPTH by by
(Ang.) IONS RECOILS
----------- ----------- ------------
400000.E-01 1322.88E-09 2665.53E-09
800000.E-01 2306.88E-09 3769.78E-09
120000.E+00 2486.53E-09 3462.51E-09
160000.E+00 2527.36E-09 4235.58E-09
200000.E+00 2649.84E-09 5425.29E-09
240000.E+00 2519.19E-09 1034.06E-08
280000.E+00 2702.92E-09 3898.40E-09
320000.E+00 2874.41E-09 8015.21E-09
360000.E+00 2580.43E-09 4865.79E-09
400000.E+00 2833.58E-09 1274.70E-08
440000.E+00 2870.33E-09 9399.07E-09
480000.E+00 2968.32E-09 1032.75E-08
520000.E+00 2821.33E-09 4890.44E-09
560000.E+00 3054.06E-09 7510.48E-09
600000.E+00 2747.84E-09 9897.85E-09
640000.E+00 2833.58E-09 5614.44E-09
680000.E+00 3090.81E-09 5969.91E-09
720000.E+00 3082.64E-09 6810.35E-09
760000.E+00 3115.30E-09 6017.34E-09
800000.E+00 3058.14E-09 4301.06E-09
840000.E+00 3270.46E-09 1360.97E-08
880000.E+00 3307.20E-09 1901.46E-08
920000.E+00 3205.13E-09 4991.78E-09
960000.E+00 3209.21E-09 1585.71E-08
100000.E+01 3237.79E-09 6889.20E-09
104000.E+01 3397.03E-09 6308.03E-09
108000.E+01 3715.50E-09 8555.09E-09
112000.E+01 3503.18E-09 1597.34E-08
116000.E+01 3825.74E-09 6503.18E-09
120000.E+01 3527.68E-09 2077.15E-08
124000.E+01 3821.66E-09 4671.55E-09
128000.E+01 3801.24E-09 8231.39E-09
132000.E+01 3821.66E-09 5099.93E-09
136000.E+01 3993.14E-09 8356.52E-09
140000.E+01 4189.12E-09 7302.62E-09
144000.E+01 4189.12E-09 1055.00E-08
148000.E+01 4466.76E-09 9413.23E-09
152000.E+01 4352.44E-09 6764.75E-09
156000.E+01 4523.93E-09 8867.51E-09
160000.E+01 4650.50E-09 1006.89E-08
164000.E+01 4899.56E-09 2136.99E-08
168000.E+01 4687.24E-09 9287.54E-09
172000.E+01 5164.95E-09 1198.28E-08
176000.E+01 5250.69E-09 1042.15E-08
180000.E+01 5618.16E-09 1011.13E-08
184000.E+01 5961.13E-09 1719.98E-08
188000.E+01 6153.03E-09 1272.72E-08
192000.E+01 6357.18E-09 1889.56E-08
196000.E+01 6843.05E-09 1423.70E-08
200000.E+01 7369.75E-09 1883.37E-08
204000.E+01 7688.22E-09 1760.50E-08
208000.E+01 8129.19E-09 1952.17E-08
212000.E+01 8941.70E-09 1604.88E-08
216000.E+01 9672.55E-09 2065.69E-08
220000.E+01 1108.93E-08 2392.81E-08
224000.E+01 1260.82E-08 2033.92E-08
228000.E+01 1484.97E-08 3606.07E-08
232000.E+01 2125.18E-08 4216.72E-08
236000.E+01 4318.55E-08 7405.67E-08
240000.E+01 8061.41E-08 1119.78E-07
244000.E+01 7804.59E-08 8234.15E-08
248000.E+01 3123.88E-08 3013.70E-08
252000.E+01 5250.69E-09 5132.57E-09
256000.E+01 3143.88E-10 2866.70E-10
260000.E+01 0000.00E+00 0000.00E+00
264000.E+01 0000.00E+00 0000.00E+00
268000.E+01 0000.00E+00 0000.00E+00
272000.E+01 0000.00E+00 0000.00E+00
276000.E+01 0000.00E+00 0000.00E+00
280000.E+01 0000.00E+00 0000.00E+00
284000.E+01 0000.00E+00 0000.00E+00
288000.E+01 0000.00E+00 0000.00E+00
292000.E+01 0000.00E+00 0000.00E+00
296000.E+01 0000.00E+00 0000.00E+00
300000.E+01 0000.00E+00 0000.00E+00
304000.E+01 0000.00E+00 0000.00E+00
308000.E+01 0000.00E+00 0000.00E+00
312000.E+01 0000.00E+00 0000.00E+00
316000.E+01 0000.00E+00 0000.00E+00
320000.E+01 0000.00E+00 0000.00E+00
324000.E+01 0000.00E+00 0000.00E+00
328000.E+01 0000.00E+00 0000.00E+00
332000.E+01 0000.00E+00 0000.00E+00
336000.E+01 0000.00E+00 0000.00E+00
340000.E+01 0000.00E+00 0000.00E+00
344000.E+01 0000.00E+00 0000.00E+00
348000.E+01 0000.00E+00 0000.00E+00
352000.E+01 0000.00E+00 0000.00E+00
356000.E+01 0000.00E+00 0000.00E+00
360000.E+01 0000.00E+00 0000.00E+00
364000.E+01 0000.00E+00 0000.00E+00
368000.E+01 0000.00E+00 0000.00E+00
372000.E+01 0000.00E+00 0000.00E+00
376000.E+01 0000.00E+00 0000.00E+00
380000.E+01 0000.00E+00 0000.00E+00
384000.E+01 0000.00E+00 0000.00E+00
388000.E+01 0000.00E+00 0000.00E+00
392000.E+01 0000.00E+00 0000.00E+00
396000.E+01 0000.00E+00 0000.00E+00
400000.E+01 0000.00E+00 0000.00E+00
To convert to Energy Lost - multiply by Average Binding Energy = 2 eV/Vacancy