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Copy pathVACANCY_5.6MeV.txt
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VACANCY_5.6MeV.txt
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====== H (10) into Layer 1 =======
SRIM-2013.00
==========================================
Ion and Target VACANCY production
See SRIM Outputs\TDATA.txt for calc. details
==========================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
See file : SRIM Outputs\TDATA.txt for calculation data
Ion = H Energy = 5600 keV
============= TARGET MATERIAL ======================================
Layer 1 : Layer 1
Layer Width = 4.E+06 A ;
Layer # 1- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
Layer # 1- Si = 100 Atomic Percent = 100 Mass Percent
====================================================================
Total Ions calculated =6905.00
Total Target Vacancies = 63 /Ion
==========================================================
Table Units are >>>> Vacancies/(Angstrom-Ion) <<<<
==========================================================
TARGET VACANCIES VACANCIES
DEPTH by by
(Ang.) IONS RECOILS
----------- ----------- ------------
400000.E-01 1053.58E-09 1280.09E-09
800000.E-01 2136.13E-09 4682.55E-09
120000.E+00 2338.88E-09 4222.49E-09
160000.E+00 2599.57E-09 3369.81E-09
200000.E+00 2487.33E-09 4319.50E-09
240000.E+00 2396.81E-09 4829.29E-09
280000.E+00 2653.87E-09 1497.69E-08
320000.E+00 2719.04E-09 6554.58E-09
360000.E+00 2440.26E-09 3929.99E-09
400000.E+00 2592.32E-09 1249.84E-08
440000.E+00 2780.59E-09 4715.39E-09
480000.E+00 2722.66E-09 3952.69E-09
520000.E+00 2773.35E-09 4375.17E-09
560000.E+00 2595.94E-09 1735.96E-08
600000.E+00 2661.12E-09 6348.16E-09
640000.E+00 2595.94E-09 5252.95E-09
680000.E+00 2773.35E-09 5390.33E-09
720000.E+00 2809.56E-09 6216.81E-09
760000.E+00 2910.93E-09 4875.68E-09
800000.E+00 2932.66E-09 5639.57E-09
840000.E+00 3077.48E-09 6834.93E-09
880000.E+00 3034.03E-09 7279.77E-09
920000.E+00 2918.18E-09 1830.88E-08
960000.E+00 3044.90E-09 8337.20E-09
100000.E+01 3110.07E-09 8304.66E-09
104000.E+01 3099.20E-09 5637.42E-09
108000.E+01 2990.59E-09 8376.37E-09
112000.E+01 3356.26E-09 6987.15E-09
116000.E+01 3356.26E-09 1354.30E-08
120000.E+01 3450.40E-09 4185.03E-09
124000.E+01 3233.16E-09 3524.45E-09
128000.E+01 3403.33E-09 7301.98E-09
132000.E+01 3486.60E-09 7102.91E-09
136000.E+01 3653.15E-09 5614.44E-09
140000.E+01 3533.67E-09 9783.87E-09
144000.E+01 3667.63E-09 1940.80E-08
148000.E+01 3555.39E-09 7696.01E-09
152000.E+01 3837.80E-09 8944.60E-09
156000.E+01 3881.25E-09 9438.82E-09
160000.E+01 4210.72E-09 8912.66E-09
164000.E+01 4047.79E-09 5418.09E-09
168000.E+01 4283.13E-09 1037.26E-08
172000.E+01 4203.48E-09 8494.13E-09
176000.E+01 4587.26E-09 1532.87E-08
180000.E+01 4569.15E-09 8555.83E-09
184000.E+01 4699.49E-09 1120.45E-08
188000.E+01 5014.48E-09 8761.59E-09
192000.E+01 4952.93E-09 1547.57E-08
196000.E+01 5238.96E-09 2545.75E-08
200000.E+01 5496.02E-09 1078.90E-08
204000.E+01 5582.91E-09 1064.27E-08
208000.E+01 5934.11E-09 1111.67E-08
212000.E+01 6198.41E-09 1553.81E-08
216000.E+01 6419.26E-09 1893.58E-08
220000.E+01 6719.77E-09 1852.30E-08
224000.E+01 7226.65E-09 1506.76E-08
228000.E+01 7733.53E-09 2089.81E-08
232000.E+01 8272.99E-09 2569.31E-08
236000.E+01 8942.80E-09 1978.03E-08
240000.E+01 1003.98E-08 2325.83E-08
244000.E+01 1141.20E-08 2742.81E-08
248000.E+01 1287.83E-08 2329.13E-08
252000.E+01 1660.39E-08 3398.36E-08
256000.E+01 2405.87E-08 5083.57E-08
260000.E+01 4816.44E-08 7520.30E-08
264000.E+01 7865.68E-08 1020.80E-07
268000.E+01 6916.73E-08 7728.95E-08
272000.E+01 2979.72E-08 3479.55E-08
276000.E+01 5057.93E-09 4350.69E-09
280000.E+01 5792.90E-10 5982.22E-10
284000.E+01 5068.79E-11 1388.53E-11
288000.E+01 0000.00E+00 0000.00E+00
292000.E+01 0000.00E+00 0000.00E+00
296000.E+01 0000.00E+00 0000.00E+00
300000.E+01 0000.00E+00 0000.00E+00
304000.E+01 0000.00E+00 0000.00E+00
308000.E+01 0000.00E+00 0000.00E+00
312000.E+01 0000.00E+00 0000.00E+00
316000.E+01 0000.00E+00 0000.00E+00
320000.E+01 0000.00E+00 0000.00E+00
324000.E+01 0000.00E+00 0000.00E+00
328000.E+01 0000.00E+00 0000.00E+00
332000.E+01 0000.00E+00 0000.00E+00
336000.E+01 0000.00E+00 0000.00E+00
340000.E+01 0000.00E+00 0000.00E+00
344000.E+01 0000.00E+00 0000.00E+00
348000.E+01 0000.00E+00 0000.00E+00
352000.E+01 0000.00E+00 0000.00E+00
356000.E+01 0000.00E+00 0000.00E+00
360000.E+01 0000.00E+00 0000.00E+00
364000.E+01 0000.00E+00 0000.00E+00
368000.E+01 0000.00E+00 0000.00E+00
372000.E+01 0000.00E+00 0000.00E+00
376000.E+01 0000.00E+00 0000.00E+00
380000.E+01 0000.00E+00 0000.00E+00
384000.E+01 0000.00E+00 0000.00E+00
388000.E+01 0000.00E+00 0000.00E+00
392000.E+01 0000.00E+00 0000.00E+00
396000.E+01 0000.00E+00 0000.00E+00
400000.E+01 0000.00E+00 0000.00E+00
To convert to Energy Lost - multiply by Average Binding Energy = 2 eV/Vacancy