Merge pull request #2 from SiEPIC/master

Update to latest version

Former-commit-id: 936b49b

klayout_dot_config/grain.xml

@@ -1,7 +1,7 @@
 <?xml version="1.0" encoding="utf-8"?>
 <salt-grain>
  <name>siepic_ebeam_pdk</name>
- <version>0.3.26</version>
+ <version>0.3.27</version>
  <api-version>0.25</api-version>
  <title>SiEPIC EBeam PDK</title>
  <doc>A Process Design Kit for Silicon Photonics fabricated using Electron Beam Lithography</doc>
@@ -14,6 +14,6 @@
  <depends>
   <name>siepic_tools</name>
   <url/>
-  <version>0.3.50</version>
+  <version>0.3.63</version>
  </depends>
 </salt-grain>

klayout_dot_config/tech/EBeam/WAVEGUIDES.xml

@@ -6,6 +6,7 @@
 	  <model>ebeam_wg_integral_1550</model>
 	  <bezier>0.20</bezier>
       <radius>5.0</radius>
+      <width>0.5</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>0.5</width>
@@ -22,6 +23,7 @@
 	  <CML>EBeam</CML>
 	  <model>ebeam_wg_integral_1310</model>
       <radius>5.0</radius>
+      <width>0.41</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>0.41</width>
@@ -34,6 +36,7 @@
 	  <model>ebeam_wg_integral_1310</model>
 	  <bezier>0.20</bezier>
       <radius>5.0</radius>
+      <width>0.35</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>0.35</width>
@@ -45,6 +48,7 @@
 	  <CML>EBeam</CML>
 	  <model>ebeam_wg_integral_1550</model>
       <radius>15.0</radius>
+      <width>0.5</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>0.5</width>
@@ -61,6 +65,7 @@
 	  <CML>EBeam</CML>
 	  <model>ebeam_wg_integral_1550</model>
       <radius>10.0</radius>
+      <width>0.45</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>0.45</width>
@@ -78,6 +83,7 @@
 	  <model>ebeam_wg_integral_1550</model>
 	  <bezier>0.20</bezier>
       <radius>300.0</radius>
+      <width>2.0</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>2.0</width>
@@ -90,6 +96,7 @@
 	  <model>ebeam_wg_integral_1550</model>
 	  <bezier>0.20</bezier>
       <radius>500.0</radius>
+      <width>3.0</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>3.0</width>
@@ -101,6 +108,7 @@
 	  <CML>EBeam_beta</CML>
 	  <model>ebeam_wg_eskid_1550</model>
       <radius>3.0</radius>
+      <width>1.31</width>
 	  <bezier>0.20</bezier>
 	  <component>
 	    <layer>Si</layer>
@@ -153,6 +161,7 @@
 	  <CML>EBeam</CML>
 	  <model>ebeam_wg_rib_1550</model>
       <radius>15.0</radius>
+      <width>0.5</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>0.5</width>
@@ -169,6 +178,7 @@
 	  <CML>EBeam</CML>
 	  <model>ebeam_wg_rib_1550</model>
       <radius>15.0</radius>
+      <width>0.35</width>
 	  <component>
 	    <layer>Si</layer>
 	    <width>0.35</width>

klayout_dot_config/tech/EBeam/drc/SiEPIC_EBeam_DRC.lydrc

@@ -16,6 +16,7 @@
  <dsl-interpreter-name>drc-dsl-xml</dsl-interpreter-name>
  <text># Basic DRC deck for SiEPIC_EBeam_PDK
 # Lukas Chrostowski, 2016
+# Mustafa Hammood, 2020 update
 
 # Read about DRC scripts in the User Manual under "Design Rule Check (DRC)"
 # http://klayout.de/doc/manual/drc_basic.html
@@ -24,50 +25,83 @@ report("DRC")
 
 # Layers:
 LayerSi=input(1,0)
+LayerSip6nm=input(31,0)
+LayerSi_rib=input(2,0)
 DevRec=input(68,0)
 LayerFP=input(99)
 LayerM1=input(11,0)
 LayerM2=input(12,0)
+LayerMLOpen=input(13,0)
+LayerVC=input(40,0)
 LayerN=input(20,0)
 LayerNpp=input(24,0)
 
-# minimum feature size of 60nm of silicon
-LayerSi.width(0.06, angle_limit(80)).output("Si_width","Si minimum feature size violation; min 60 nm")
-LayerSi.space(0.06).output("Si_space","Si minimum space violation; min 60 nm")
+#################
+# non-physical checks
+#################
 
-# Check device overlaps
+# Check device overlaps (functional check)
 overlaps = DevRec.merged(2)
 output(overlaps, "Devices","Devices cannot be overlapping")
 
 # make sure the devices are within the floor plan layer region;
 LayerSi.outside(LayerFP).output("Boundary","devices are out of boundary")
 
-# Metal rules based on the metalization process provided by Applied Nanotools.
-# Based contact optical lithography
+#################
+# physical checks
+#################
+
+# minimum feature size of Si is 60 nm and minimum exclusion between Si is 60 nm
+LayerSi.width(0.06, angle_limit(80)).output("Si_width","Si minimum feature size violation; min 60 nm")
+LayerSip6nm.width(0.06, angle_limit(80)).output("Sip6nm_width","Si minimum feature size violation; min 60 nm")
+LayerSi.space(0.06, angle_limit(80)).output("Si_space","Si minimum space violation; min 60 nm")
+LayerSip6nm.space(0.06, angle_limit(80)).output("Sip6nm_space","Si minimum space violation; min 60 nm")
+
+# minimum feature size of Si rib is 100 nm and minimum exclusion between Si is 60 nm
+LayerSi_rib.width(0.1, angle_limit(80)).output("Si_rib_width","Si_rib minimum feature size violation; min 100 nm")
+
+# Metal rules based on the metalization process provided by Applied Nanotools, based on contact optical lithography.
 # Metal heater, M1
-LayerM1.width(3.0).output("M1_width","M1 minimum feature size violation; min 3 micron")
-LayerM1.space(3.0).output("M1_space","M1 minimum space violation; min 3 micron")
+LayerM1.width(3.0, angle_limit(70)).output("M1_width","M1 minimum feature size violation; min 3 µm")
+LayerM1.space(3.0).output("M1_space","M1 minimum space violation; min 3 µm")
 
 # Metal routing/contact, M2
-LayerM2.width(5.0).output("M2_width","M2 minimum feature size violation; min 5 micron")
-LayerM2.space(10.0).output("M2_space","M2 minimum space violation; min 10 micron")
-LayerM2.overlap(LayerM1,3.0).output("M2_M1_overlap","M2 minimum overlap with M1 violation; min 3 micron")
+LayerM2.width(5.0, angle_limit(70)).output("M2_width","M2 minimum feature size violation; min 5 µm")
+LayerM2.space(8.0).output("M2_space","M2 minimum space violation; min 8 µm")
 
 # Metal pad air opening, MLOpen
-LayerMLOpen=input(13,0)
-LayerMLOpen.width(10.0).output("MLOpen_width","MLOpen minimum feature size violation; min 10 micron")
-LayerMLOpen.space(10.0).output("MLOpen_space","MLOpen minimum space violation; min 10 micron")
+LayerMLOpen.width(10.0).output("MLOpen_width","MLOpen minimum feature size violation; min 10 µm")
+LayerMLOpen.space(10.0).output("MLOpen_space","MLOpen minimum space violation; min 10 µm")
 
 # Doping rules based on the experimental process
-# minimum feature size of 3 µm
-LayerNpp.width(3.0, angle_limit(80)).output("Npp_width","Doping minimum feature size violation; min 3 µm")
-LayerNpp.space(5.0).output("Npp_space","Doping minimum space violation; min 5 µm")
+# Oxide contact vias
+LayerVC.width(5.0, angle_limit(70)).output("VC_width","VC minimum feature size violation; min 5 µm")
+LayerVC.space(5.0).output("VC_space","VC minimum space violation; min 5 µm")
+
+# NPP Doping
+LayerNpp.width(2.0, angle_limit(70)).output("Npp_width","Npp Doping minimum feature size violation; min 2 µm")
+LayerNpp.space(2.0).output("Npp_space","Npp minimum space violation; min 2 µm")
+
+# N Doping
+LayerN.width(2.0, angle_limit(70)).output("N_width","N Doping minimum feature size violation; min 2 µm")
+LayerN.space(2.0).output("N_space","N minimum space violation; min 2 µm")
+
+# minimum separation between NPP and Si
+LayerNpp.separation(LayerSi, 2.0).output("Npp_Si_separation","Npp-Si minimum separation violation; min 2 µm")
+
+# minimum separation between VC and Si
+LayerVC.separation(LayerSi, 3.0).output("VC_Si_separation","VC-Si minimum separation violation; min 3 µm")
+
+# minimum overlap rules:
+LayerM2.overlap(LayerM1,3.0).output("M2_M1_overlap","M2 minimum overlap with M1 violation; min 3 µm")
+LayerM2.overlap(LayerVC, 5.0).output("M2_VC_overlap","Metal2-VC minimum overlap violation; min 5 µm")
+LayerN.overlap(LayerNpp, 3.0).output("N_Npp_overlap","N-Npp minimum overlap violation; min 3 µm")
+LayerVC.overlap(LayerNpp, 5.0).output("VC_Npp_overlap","VC-Npp minimum overlap violation; min 5 µm")
 
-# minimum separation:
-LayerNpp.separation(LayerSi, 4.0).output("Npp_Si_separation","Npp-Si minimum separation violation; min 4 µm")
+# minimum inclusion rules:
+LayerM2.enclosing(LayerVC, 1.0).output("M2_VC_enclosure","M2-VC minimum enclosure violation; min 1 µm")
+LayerSi_rib.enclosing(LayerVC, 1.0).output("Si_rib_VC_enclosure","Si_rib-VC minimum enclosure violation; min 1 µm")
 
-# minimum overlap:
-LayerM2.overlap(LayerNpp, 7.0).output("M_Npp_overlap","Metal2-Npp minimum overlap violation; min 7 µm")
 
 </text>
 </klayout-macro>

klayout_dot_config/tech/EBeam/pymacros/SiEPIC_EBeam Library.lym

@@ -165,7 +165,8 @@ class Waveguide(pya.PCellDeclarationHelper):
 
   def produce_impl(self):
 
-    from SiEPIC.utils import arc_xy, arc_bezier, angle_vector, angle_b_vectors, inner_angle_b_vectors, translate_from_normal
+    from SiEPIC.utils.layout import layout_waveguide2
+    from SiEPIC.utils import  angle_vector
     from math import cos, sin, pi, sqrt
     import pya
     from SiEPIC.extend import to_itype
@@ -181,47 +182,10 @@ class Waveguide(pya.PCellDeclarationHelper):
     if not (len(self.layers)==len(self.widths) and len(self.layers)==len(self.offsets) and len(self.offsets)==len(self.widths)):
       raise Exception("There must be an equal number of layers, widths and offsets")
     path.unique_points()
-    turn=0
-    for lr in range(0, len(self.layers)):
-      layer = self.layout.layer(TECHNOLOGY[self.layers[lr]])
-
-      width = to_itype(self.widths[lr],dbu)
-      offset = to_itype(self.offsets[lr],dbu)
-
-      pts = path.get_points()
-      wg_pts = [pts[0]]
-      for i in range(1,len(pts)-1):
-        turn = ((angle_b_vectors(pts[i]-pts[i-1],pts[i+1]-pts[i])+90)%360-90)/90
-        dis1 = pts[i].distance(pts[i-1])
-        dis2 = pts[i].distance(pts[i+1])
-        angle = angle_vector(pts[i]-pts[i-1])/90
-        pt_radius = to_itype(self.radius,dbu)
-        # determine the radius, based on how much space is available
-        if len(pts)==3:
-          pt_radius = min (dis1, dis2, pt_radius)
-        else:
-          if i==1:
-            if dis1 <= pt_radius:
-              pt_radius = dis1
-          elif dis1 < 2*pt_radius:
-            pt_radius = dis1/2
-          if i==len(pts)-2:
-            if dis2 <= pt_radius:
-              pt_radius = dis2
-          elif dis2 < 2*pt_radius:
-            pt_radius = dis2/2
-        # waveguide bends:
-        if(self.adiab):
-          wg_pts += Path(arc_bezier(pt_radius, 270, 270 + inner_angle_b_vectors(pts[i-1]-pts[i], pts[i+1]-pts[i]), self.bezier, DevRec='DevRec' in self.layers[lr]), 0).transformed(Trans(angle, turn < 0, pts[i])).get_points()
-        else:
-          wg_pts += Path(arc_xy(-pt_radius, pt_radius, pt_radius, 270, 270 + inner_angle_b_vectors(pts[i-1]-pts[i], pts[i+1]-pts[i]),DevRec='DevRec' in self.layers[lr]), 0).transformed(Trans(angle, turn < 0, pts[i])).get_points()
-      wg_pts += [pts[-1]]
-      wg_pts = pya.Path(wg_pts, 0).unique_points().get_points()
-      wg_polygon = Polygon(translate_from_normal(wg_pts, width/2 + (offset if turn > 0 else - offset))+translate_from_normal(wg_pts, -width/2 + (offset if turn > 0 else - offset))[::-1])
-      self.cell.shapes(layer).insert(wg_polygon)
-
-      if self.layout.layer(TECHNOLOGY['Waveguide']) == layer:
-        waveguide_length = wg_polygon.area() / self.width * dbu**2
+    pts = path.get_points()
+
+    # Draw the waveguide geometry, new in SiEPIC-Tools v0.3.64
+    waveguide_length = layout_waveguide2(TECHNOLOGY, self.layout, self.cell, self.layers, self.widths, self.offsets, pts, self.radius, self.adiab, self.bezier)
 
     pts = path.get_points()
     LayerPinRecN = self.layout.layer(TECHNOLOGY['PinRec'])
@@ -245,47 +209,46 @@ class Waveguide(pya.PCellDeclarationHelper):
     if angle_vec == 0: # horizontal
       halign = 2 # right
       angle=0
-      pt2=pts[0] + Point(0, wg_width)
-      pt3=pts[0] + Point(0, -wg_width)
-      pt4=pts[0] + Point(0, -2*wg_width)
+      pt2=pts[0] + Point(0, 0.2*wg_width)
+      pt3=pts[0] + Point(0, -0.2*wg_width)
+      pt4=pts[0] + Point(0, -0.5*wg_width)
     if angle_vec == 2: # horizontal
       halign = 0 # left
       angle = 0
-      pt2=pts[0] + Point(0, wg_width)
-      pt3=pts[0] + Point(0, -wg_width)
-      pt4=pts[0] + Point(0, -2*wg_width)
+      pt2=pts[0] + Point(0, 0.2*wg_width)
+      pt3=pts[0] + Point(0, -0.2*wg_width)
+      pt4=pts[0] + Point(0, -0.5*wg_width)
     if angle_vec == 1: # vertical
       halign = 2 # right
       angle = 1
-      pt2=pts[0] + Point(wg_width,0)
-      pt3=pts[0] + Point(-wg_width,0)
-      pt4=pts[0] + Point(-2*wg_width,0)
+      pt2=pts[0] + Point(0.2*wg_width,0)
+      pt3=pts[0] + Point(-0.2*wg_width,0)
+      pt4=pts[0] + Point(-0.5*wg_width,0)
     if angle_vec == -1: # vertical
       halign = 0 # left
       angle = 1
-      pt2=pts[0] + Point(wg_width,0)
-      pt3=pts[0] + Point(-wg_width,0)
-      pt4=pts[0] + Point(-2*wg_width,0)
+      pt2=pts[0] + Point(0.2*wg_width,0)
+      pt3=pts[0] + Point(-0.2*wg_width,0)
+      pt4=pts[0] + Point(-0.5*wg_width,0)
 
-    t = Trans(angle, False, pts[0]) 
-
-    text = Text ('Lumerical_INTERCONNECT_library=Design kits/%s' % self.CML, t, 0.1/dbu, -1)
+    t = Trans(angle, False, pt3) 
+    text = Text ('Lumerical_INTERCONNECT_library=Design kits/%s' % self.CML, t, 0.1*wg_width, -1)
     text.halign=halign
     shape = self.cell.shapes(LayerDevRecN).insert(text)
     t = Trans(angle, False, pt2)
-    text = Text ('Component=%s' % self.model, t, 0.1/dbu, -1)
+    text = Text ('Component=%s' % self.model, t, 0.1*wg_width, -1)
     text.halign=halign
     shape = self.cell.shapes(LayerDevRecN).insert(text)
-    t = Trans(angle, False, pt3)
+    t = Trans(angle, False, pts[0])
     pts_txt = str([ [round(p.to_dtype(dbu).x,3), round(p.to_dtype(dbu).y,3)] for p in pts ]).replace(', ',',')
     text = Text ( \
       'Spice_param:wg_length=%.3fu wg_width=%.3fu points="%s" radius=%s' %\
-        (waveguide_length, self.width, pts_txt,self.radius ), t, 0.1/dbu, -1  )
+        (waveguide_length, self.width, pts_txt,self.radius ), t, 0.1*wg_width, -1  )
     text.halign=halign
     shape = self.cell.shapes(LayerDevRecN).insert(text)
     t = Trans(angle, False, pt4)
     text = Text ( \
-      'Length=%.3fu' %(waveguide_length), t, 0.5/dbu, -1  )
+      'Length=%.3fu' %(waveguide_length), t, 0.5*wg_width, -1  )
     text.halign=halign
     shape = self.cell.shapes(LayerDevRecN).insert(text)
 
@@ -1746,15 +1709,15 @@ class SiEPIC_EBeam(Library):
 # windows only allows for a fixed width, short description 
     self.description = ""
 # OSX does a resizing:
-    self.description = "Components with models"
+    self.description = "v0.3.28, Components with models"
 
 
     # Import all the GDS files from the tech folder "gds"
     import os, fnmatch
     dir_path = os.path.join(os.path.dirname(os.path.realpath(__file__)), "../gds/mature")
     search_str = '*' + '.gds'
     for root, dirnames, filenames in os.walk(dir_path, followlinks=True):
-        for filename in fnmatch.filter(filenames, search_str):
+        for filename in fnmatch.filter([f.lower() for f in filenames], search_str):
             file1=os.path.join(root, filename)
             print(" - reading %s" % file1 )
             self.layout().read(file1)