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Signed-off-by: Lucas Heitzmann Gabrielli <lucas@flexcompute.com>
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lucas-flexcompute committed Oct 17, 2024
1 parent 0215bbb commit 0a9f24c
Showing 1 changed file with 4 additions and 4 deletions.
8 changes: 4 additions & 4 deletions siepic_forge/technology.py
Original file line number Diff line number Diff line change
Expand Up @@ -33,7 +33,7 @@ def ebeam(
si_thickness (float): Full silicon layer thickness.
si_slab_thickness (float): Partially etched slab thickness in
silicon.
sin_thickness (float): SiN layer thinckness.
sin_thickness (float): SiN layer thickness.
si_mask_dilation (float): Mask dilation for the full-thickness Si
layer.
si_slab_mask_dilation (float): Mask dilation for the partially
Expand All @@ -44,9 +44,9 @@ def ebeam(
top_oxide_thickness (float): Thickness of the top oxide clad,
measured from the substrate.
bottom_oxide_thickness (float): Thickness of the bottom oxide clad.
include_top_opening (bool): Flag indicating wether or not to include
the region above the top oxide.
include_substrate (bool): Flag indicating wether or not to include
include_top_opening (bool): Flag indicating whether or not to
include the region above the top oxide.
include_substrate (bool): Flag indicating whether or not to include
the silicon substrate.
sio2 (Medium): Background medium.
si (Medium): Silicon medium.
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